Vacuum technology, thin films, and sputtering : an introduction

Author(s)

• Stuart, R. V.

Bibliographic Information

Vacuum technology, thin films, and sputtering : an introduction

R.V. Stuart

Academic Press, 1983

Note

Includes index

Details

• NCID: BA06945480
• ISBN:
  • 0126747806
• LCCN: 82013748
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: viii, 151 p.
• Size: 24 cm
• Classification:
  • LCC : TP156.V3
  • DC19 : 621.5/5
• Subject Headings:
  • LCSH : Vacuum technology
  • LCSH : Thin films
  • LCSH : Cathode sputtering (Plating process)