Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Author(s)

• Schuegraf, Klaus K.

Bibliographic Information

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

edited by Klaus K. Schuegraf

（Materials science and process technology series）

Noyes Publications, c1988

Other Title

Hand book of thin-film deposition processes and techniques

Note

Includes bibliographies and index

• NCID: BA07074756
• ISBN:
  • 0815511531
• LCCN: 87034702
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J., U.S.A.
• Pages/Volumes: xvii, 413 p
• Size: 25 cm
• Classification:
  • LCC : TK7872.T55
  • DC19 : 621.381/72
• Subject Headings:
  • LCSH : Thin film devices -- Design and construction -- Handbooks, manuals, etc
• Parent Bibliography ID:
  • BA04523161