Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

書誌事項

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

edited by Klaus K. Schuegraf

(Materials science and process technology series)

Noyes Publications, c1988

タイトル別名

Hand book of thin-film deposition processes and techniques

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注記

Includes bibliographies and index

内容説明・目次

内容説明

The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.

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