Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
著者
書誌事項
Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
(Materials science and process technology series)
Noyes Publications, c1988
- タイトル別名
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Hand book of thin-film deposition processes and techniques
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注記
Includes bibliographies and index
内容説明・目次
内容説明
The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
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