Silicides for VLSI applications
Author(s)
Bibliographic Information
Silicides for VLSI applications
Academic Press, 1983
- Other Title
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Silicides for V.L.S.I. applications
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Note
Bibliography: p. 177-186
Includes indexes
Description and Table of Contents
Description
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Table of Contents
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
by "Nielsen BookData"
