Bibliographic Information

ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology

edited by S. Broydo, C.M. Osburn ; assistant editors, J.M. Andrews ... [et al.]

(Proceedings / [Electrochemical Society], v. 87-11)

Electrochemical Society, c1987

Available at  / 3 libraries

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Note

The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc

Includes bibliographies and indexes

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