ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology
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ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology
(Proceedings / [Electrochemical Society], v. 87-11)
Electrochemical Society, c1987
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The Symposium was held May 11-15, 1987 in Philadelphia, Pa., and co-sponsored by the Electronics and Dielectrics & Insulation Divisions of the Electrochemical Society, Inc
Includes bibliographies and indexes