Plasma etching : an introduction

Author(s)

• Manos, Dennis M.
• Flamm, Daniel L.

Bibliographic Information

Plasma etching : an introduction

edited by Dennis M. Manos, Daniel L. Flamm

（Plasma-materials interactions）

Academic Press, c1989

Note

Includes bibliographical references and index

• NCID: BA07363130
• ISBN:
  • 0124693709
• LCCN: 87037419
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston ; Tokyo
• Pages/Volumes: xii, 476 p.
• Size: 24 cm
• Classification:
  • LCC : TA2020
  • DC19 : 621.044
  • NDC8 : 427.6
• Subject Headings:
  • LCSH : Plasma etching
• Parent Bibliography ID:
  • BA0662742X