Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.

書誌事項

Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.

editors, Míhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr

(Materials Research Society symposium proceedings, v. 131)

Materials Research Society, c1989

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Includes bibliographical references and indexes

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