Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis

Author(s)

• Cuomo, J. J.
• Rossnagel, Stephen M.
• Kaufman, Harold R.

Bibliographic Information

Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis

edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman

（Materials science and process technology series）

Noyes Publications, c1989

Note

Includes bibliographies and index

Details

• NCID: BA07446307
• ISBN:
  • 081551199X
• LCCN: 88038244
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J., U.S.A.
• Pages/Volumes: xviii, 438 p.
• Size: 25 cm
• Classification:
  • LCC : QC702.7.I55
  • DC19 : 621.381/7
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Ion bombardment -- Industrial applications
• Parent Bibliography ID:
  • BA04523161