Microstructural science for thin film metallizations in electronic applications : proceedings of the Topical Symposium held at the Annual Meeting of the Minerals, Metals, & Materials Society, sponsored by the Electronic Materials Device Committee of TMS, at Phoenix, Arizona, January 26-27, 1988

著者

• Sanchez, John
• Smith, David A. (David Anthony)
• DeLanerolle, Nimal
• Topical Symposium "Microstructural Science for Thin Film Metallizations in Electronics Applications"
• TMS Electronic Device Materials Committee

書誌事項

Microstructural science for thin film metallizations in electronic applications : proceedings of the Topical Symposium held at the Annual Meeting of the Minerals, Metals, & Materials Society, sponsored by the Electronic Materials Device Committee of TMS, at Phoenix, Arizona, January 26-27, 1988

edited by John Sanchez, David A. Smith, Nimal DeLanerolle

TMS, c1988

注記

Includes bibliographies and index

"Papers presented at the Topical Symposium 'Microstructural Science for Thin Film metallizations in Electronics Applications'"--Pref.

詳細情報

• NII書誌ID(NCID): BA07464761
• ISBN:
  • 0873390776
• LCCN: 88062442
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Warrendale, Pa.
• ページ数/冊数: viii, 191 p.
• 大きさ: 24 cm