Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

Author(s)

• Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications
• Hochman, Robert F. (Robert Francis)
• Solnick-Legg, Hillary
• Legg, Keith O.

Bibliographic Information

Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International

ASM International, c1988

Details

• NCID: BA07510621
• ISBN:
  • 0871703300
• LCCN: 88071762
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Metals Park, Ohio
• Pages/Volumes: ix, 205 p.
• Size: 29 cm