Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

著者

• Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications
• Hochman, Robert F. (Robert Francis)
• Solnick-Legg, Hillary
• Legg, Keith O.

書誌事項

Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988

edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International

ASM International, c1988

詳細情報

• NII書誌ID(NCID): BA07510621
• ISBN:
  • 0871703300
• LCCN: 88071762
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Metals Park, Ohio
• ページ数/冊数: ix, 205 p.
• 大きさ: 29 cm