Glow-discharge hydrogenated amorphous silicon
Author(s)
Bibliographic Information
Glow-discharge hydrogenated amorphous silicon
（Advances in solid state technology）
KTK Scientific , Kluwer Academic, c1989
- : U.S.
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Description and Table of Contents
Description
A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
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