Glow-discharge hydrogenated amorphous silicon

Author(s)

• 田中, 一宜 タナカ, カズノブ

Bibliographic Information

Glow-discharge hydrogenated amorphous silicon

edited by K. Tanaka

（Advances in solid state technology）

KTK Scientific , Kluwer Academic, c1989

• : U.S.

• NCID: BA07564030
• ISBN:
  • 0792303091
• LCCN: 89034244
• Country Code: ja
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Tokyo,Dordrecht ; Boston
• Pages/Volumes: 277 p.
• Size: 24 cm
• Classification:
  • NDC8 : 549.8
  • LCC : QC611.8.A5
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Amorphous semiconductors
  • LCSH : Silicon
  • LCSH : Doped semiconductors
  • LCSH : Surface chemistry
  • LCSH : Glow discharges
• Parent Bibliography ID:
  • BA03643532