Microcircuit Engineering 84 : proceedings of the Microcircuit Engineering 84 Conference held in Berlin, West Germany, on 25-29 September, 1984
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Microcircuit Engineering 84 : proceedings of the Microcircuit Engineering 84 Conference held in Berlin, West Germany, on 25-29 September, 1984
Academic Press, 1985
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Includes bibliographies and index
