Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A.

著者

• Workshop on Tungsten and Other Refractory Metals for VLSI Applications IV
• Blewer, R. S.
• McConica, Carol M.
• Ahn, Kie Y.
• Materials Research Society

書誌事項

Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A.

sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and Sandia National Laboratories, Albuquerque, New Mexico ; editors, Robert S. Blewer, Carol M. McConica ; associate editors, Kie Y. Ahn ...[et al]

（Materials Research Society conference proceedings）

Materials Research Society, c1989

注記

Includes bibliography and index

詳細情報

• NII書誌ID(NCID): BA07603380
• ISBN:
  • 0931837987
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xv, 373 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA07468230