Semiconductor fabrication : technology and metrology

著者

    • Gupta, D. C. (Dinesh C.)
    • Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.)
    • ASTM Committee F-1 on Electronics
    • Semiconductor Equipment and Materials International

書誌事項

Semiconductor fabrication : technology and metrology

Dinesh C. Gupta, editor

（ASTM special technical publication, 990）

ASTM, c1989

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注記

Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International

Includes bibliographies and indexes

"ASTM publication code number (PCN) 04-990000-46"--T.p. verso

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