Semiconductor fabrication : technology and metrology
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書誌事項
Semiconductor fabrication : technology and metrology
(ASTM special technical publication, 990)
ASTM, c1989
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注記
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International
Includes bibliographies and indexes
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso