Optical/laser microlithography : 2-4 March 1988, Santa Clara, California

著者

• Lin, Burn Jeng
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical/laser microlithography : 2-4 March 1988, Santa Clara, California

Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 922）

SPIE, c1988

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA07692256
• ISBN:
  • 0892529571
• LCCN: 88060781
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 486 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA1677
  • DC20 : 621.36/6
• 件名:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Optical instruments -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X