Optical/laser microlithography : 2-4 March 1988, Santa Clara, California

Author(s)

• Lin, Burn Jeng
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical/laser microlithography : 2-4 March 1988, Santa Clara, California

Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 922）

SPIE, c1988

Note

Includes bibliographies and index

Details

• NCID: BA07692256
• ISBN:
  • 0892529571
• LCCN: 88060781
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 486 p.
• Size: 28 cm
• Classification:
  • LCC : TA1677
  • DC20 : 621.36/6
• Subject Headings:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Optical instruments -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X