Polymers in microlithography : materials and processes

Author(s)

• Reichmanis, Elsa
• MacDonald, Scott A.
• Iwayanagi, Takao
• American Chemical Society. Division of Polymeric Materials : Science and Engineering

Bibliographic Information

Polymers in microlithography : materials and processes

Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor

（ACS symposium series, 412）

American Chemical Society, 1989

Note

Includes bibliographical references and indexes

"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989"

Details

• NCID: BA07699969
• ISBN:
  • 0841217017
• LCCN: 89017931
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, D.C.
• Pages/Volumes: xii, 449 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.15.P6
  • DC20 : 621.381/531
• Subject Headings:
  • LCSH : Polymers -- Congresses
  • LCSH : Photoresists -- Congresses
  • LCSH : Microlithography -- Materials -- Congresses
• Parent Bibliography ID:
  • BA00073096