Polymers in microlithography : materials and processes

著者

• Reichmanis, Elsa
• MacDonald, Scott A.
• Iwayanagi, Takao
• American Chemical Society. Division of Polymeric Materials : Science and Engineering

書誌事項

Polymers in microlithography : materials and processes

Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor

（ACS symposium series, 412）

American Chemical Society, 1989

注記

Includes bibliographical references and indexes

"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989"

詳細情報

• NII書誌ID(NCID): BA07699969
• ISBN:
  • 0841217017
• LCCN: 89017931
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington, D.C.
• ページ数/冊数: xii, 449 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.15.P6
  • DC20 : 621.381/531
• 件名:
  • LCSH : Polymers -- Congresses
  • LCSH : Photoresists -- Congresses
  • LCSH : Microlithography -- Materials -- Congresses
• 親書誌ID:
  • BA00073096