Vacuum microelectronics 1989 : Proceedings of the Second International Conference on Vacuum Microelectronics held in Bath, 24-26 July 1989

著者

• International Conference on Vacuum Microelectronics
• Turner, Roy E. (Roy Edgar)

書誌事項

Vacuum microelectronics 1989 : Proceedings of the Second International Conference on Vacuum Microelectronics held in Bath, 24-26 July 1989

edited by R.E. Turner

（Institute of Physics conference series, no. 99）

Institute of Physics, 1989

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA07743812
• ISBN:
  • 0854980555
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bristol
• ページ数/冊数: viii, 244 p.
• 大きさ: 24 cm
• 分類:
  • DC19 : 621.5/5
• 件名:
  • PRECIS : Microelectronics industries. Applications of vacuum technology
• 親書誌ID:
  • BA00171324