Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California
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Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 920)
International Society for Optical Engineering, 1988
- pbk.
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Includes bibliographies and index