Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California

Author(s)

• Monahan, Kevin M.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California

Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 921）

SPIE, c1988

Note

Includes bibliographies and index

Details

• NCID: BA07915612
• ISBN:
  • 0892529563
• LCCN: 88060788
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 458 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X