Photon, beam and plasma enhanced processing

著者

• European Materials Research Society
• E-MRS Symposium XV on photon, beam and plasma enhanced processing
• Golanski, A.
• Nguyen, V. T.
• Krimmel, E. F.

書誌事項

Photon, beam and plasma enhanced processing

edited by A. Golanski, V. T. Neguyen, E. F. Krimmel

Les Editions de Physique, c1987

注記

proceedings of the E-MRS Symposium XV on "PHOTON, BEAM AND PLASMA ENHANCED PROCESSING" held in Strasbourg, France on 2-5 June 1987

Includes bibliographis and index

• NII書誌ID(NCID): BA07944246
• ISBN:
  • 2868830617
• 出版国コード: fr
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Les Ulis
• ページ数/冊数: xxxii, 701 p.
• 大きさ: 24 cm