Photon, beam and plasma enhanced processing

Author(s)

Bibliographic Information

Photon, beam and plasma enhanced processing

edited by A. Golanski, V. T. Neguyen, E. F. Krimmel

Les Editions de Physique, c1987

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Note

proceedings of the E-MRS Symposium XV on "PHOTON, BEAM AND PLASMA ENHANCED PROCESSING" held in Strasbourg, France on 2-5 June 1987

Includes bibliographis and index

Details

  • NCID
    BA07944246
  • ISBN
    • 2868830617
  • Country Code
    fr
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Les Ulis
  • Pages/Volumes
    xxxii, 701 p.
  • Size
    24 cm
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