Secondary ion mass spectrometry : principles and applications

著者

• Vickerman, J. C.
• Brown, A. (Alan)
• Reed, Nicola M.

書誌事項

Secondary ion mass spectrometry : principles and applications

edited by John C. Vickerman, Alan Brown, and Nicola M. Reed

（International series of monographs on chemistry, 17）

Clarendon Press , Oxford University Press, 1989

注記

Includes bibliographies and index

内容説明・目次

内容説明

Secondary ion mass spectrometry is developing into one of the most effective methods of characterizing the composition and chemical state of the surface and sub-surface layers of solid materials. This book attempts to provide an overview of the phenomenology, technology and application of this method as a technique for materials analysis. The text explains the basic physical and chemical principles and introduces theories which have been developed to explain the process. It also covers emergent techniques such as sputtered neutral mass spectrometry and laser microprobe and plasma desorption mass spectrometry. The author outlines the practical benefits and pitfalls which may arise and features many practical examples to illustrate the application of secondary ion mass spectrometry to real problems.

目次

• Introducing secondary ion mass spectrometry, John Vickerman
• the SIMS phenomenon - the experimental parameters, John Vickerman
• SIMS - the theoretical models, John Vickerman
• SIMS instrumentation, A.J.Eccles
• SIMS depth profiling of semiconductors, D.S.McPhail
• the application of static SIMS in surface science, John Vickerman
• static SIMS for applied surface analysis, Nicola M.Reed
• SIMS imaging, P.Humphrey
• SIMS-related techniques, John Vickerman.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA07998540
• ISBN:
  • 019855625X
• LCCN: 88038479
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Oxford,Oxford ; New York
• ページ数/冊数: xii, 341 p.
• 大きさ: 24 cm
• 分類:
  • LCC : QD96.S43
  • DC19 : 543/.0873
• 件名:
  • LCSH : Secondary ion mass spectrometry
• 親書誌ID:
  • BA00569943