Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

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Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt

Scanning Electron Microscopy, c1984

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Includes bibliographies and indexes

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