Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

Author(s)

• Pfefferkorn Conference
• Hren, John J.
• Bhatt, Sudha A.

Bibliographic Information

Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt

Scanning Electron Microscopy, c1984

Note

Includes bibliographies and indexes

Details

• NCID: BA08047103
• ISBN:
  • 0931288347
• LCCN: 88141378
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: AMF O'Hare [Chicago], IL. U.S.A.
• Pages/Volumes: 272, viii p.
• Size: 29 cm
• Classification:
  • LCC : QC793.5.E62
  • DC19 : 535/.3325
• Subject Headings:
  • LCSH : Electron optics -- Congresses
  • LCSH : Electron microscopy -- Congresses
  • LCSH : Microchemistry -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Magnetic lenses -- Congresses