Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

著者

• Pfefferkorn Conference
• Hren, John J.
• Bhatt, Sudha A.

書誌事項

Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD

edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt

Scanning Electron Microscopy, c1984

注記

Includes bibliographies and indexes

• NII書誌ID(NCID): BA08047103
• ISBN:
  • 0931288347
• LCCN: 88141378
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: AMF O'Hare [Chicago], IL. U.S.A.
• ページ数/冊数: 272, viii p.
• 大きさ: 29 cm
• 分類:
  • LCC : QC793.5.E62
  • DC19 : 535/.3325
• 件名:
  • LCSH : Electron optics -- Congresses
  • LCSH : Electron microscopy -- Congresses
  • LCSH : Microchemistry -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Magnetic lenses -- Congresses