A user's guide to vacuum technology
著者
書誌事項
A user's guide to vacuum technology
Wiley, c1989
2nd ed
大学図書館所蔵 全16件
注記
"A Wiley-Interscience publication."
Includes bibliographical references and index
内容説明・目次
内容説明
This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.
目次
Partial table of contents: Vacuum Technology. Gas Properties. Gas Flow. Gas Release from Solids. MEASUREMENT. Pressure Gauges. Flow Meters. Pumping Speed. Residual Gas Analyzers. Interpretation of RGA Data. PRODUCTION. Mechanical Pumps. Turbomolecular Pumps. Diffusion Pumps. Vacuum Pump Fluids. Getter and Ion Pumps. Cryogenic Pumps. MATERIALS. Materials in Vacuum. Joints, Seals, and Components. Lubrication. SYSTEMS. High Vacuum Pump Systems. Ultrahigh Vacuum Systems. High Flow Systems. Leak Detection. Appendices. Index.
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