Excimer beam applications, 6 September 1988, Boston, Massachusetts

著者

• Pirri, Anthony N.
• Piwczyk, Bernhard P.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Excimer beam applications, 6 September 1988, Boston, Massachusetts

Anthony N. Pirri, Bernhard P. Piwczyk, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Applied Optics Laboratory/New Mexico State University ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 998）

SPIE--International Society for Optical Engineering, c1988

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA09832979
• ISBN:
  • 0819400335
• LCCN: 88062998
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 128 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X