Fundamentals of microelectronics processing

Author(s)

• Lee, Hong H.

Bibliographic Information

Fundamentals of microelectronics processing

Hong H. Lee

（McGraw-Hill chemical engineering series）

McGraw-Hill, c1990

• pbk.

Note

Includes bibliographies and index

Details

• NCID: BA09942784
• ISBN:
  • 0070370567
  • 0071007962
• LCCN: 89012114
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York ; Tokyo
• Pages/Volumes: xvi, 514 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Integrated circuits -- Materials
• Parent Bibliography ID:
  • BA00069893