Reduced thermal processing for ULSI
著者
書誌事項
Reduced thermal processing for ULSI
（NATO ASI series, ser. B . Physics ; v. 207）
Plenum Press, c1989
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注記
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso
Includes bibliographical references
