Reduced thermal processing for ULSI

著者

• Levy, Roland A. (Roland Albert)
• NATO Advanced Study Institute on Reduced Thermal Processing for ULSI
• North Atlantic Treaty Organization. Scientific Affairs Division

書誌事項

Reduced thermal processing for ULSI

edited by Roland A. Levy

（NATO ASI series, ser. B . Physics ; v. 207）

Plenum Press, c1989

注記

"Published in cooperation with NATO Scientific Affairs Division."

"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso

Includes bibliographical references

• NII書誌ID(NCID): BA10120443
• ISBN:
  • 0306433826
• LCCN: 89023011
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: xi, 438 p.
• 大きさ: 26 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.39/5
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Heat treatment -- Congresses
• 親書誌ID:
  • BA00020624