Plasma-surface interactions and processing of materials

著者

• NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials
• Auciello, Orlando

書誌事項

Plasma-surface interactions and processing of materials

edited by Orland Auciello ... [et al.]

（NATO ASI series, ser. E . Applied sciences ; no. 176）

Kluwer Academic Publishers, c1990

注記

"Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988"--T.p. verso

• NII書誌ID(NCID): BA10180092
• ISBN:
  • 0792305841
• LCCN: 89048126
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Dordrecht ; Boston
• ページ数/冊数: xiii, 557 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TA418.7
  • DC20 : 620/.44
• 件名:
  • LCSH : Materials -- Surfaces -- Congresses
  • LCSH : Materials -- Effect of radiation on -- Congresses
  • LCSH : Microelectronics -- Materials -- Effect of radiation on -- Congresses
  • LCSH : Plasma etching -- Congresses
• 親書誌ID:
  • BA00020624