Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California

Author(s)

• Craighead, Harold G.
• Narayan, J. (Jaydish)
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

Bibliographic Information

Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California

Harold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 945）

SPIE, c1988

Note

Includes bibliographies and indexes

Details

• NCID: BA10254734
• ISBN:
  • 0892529806
• LCCN: 88060789
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 164 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X