Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

Author(s)

• Glembocki, Orest J.
• Pollak, Fred H.
• Ponce, Fernando A.
• Optical Society of America
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

Bibliographic Information

Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 946）

The Society, c1988

Note

Includes bibliographies and index

Details

• NCID: BA10254803
• ISBN:
  • 0892529814
• LCCN: 88060787
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., U.S.A.
• Pages/Volumes: viii, 234 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Spectrum analysis -- Congresses
• Parent Bibliography ID:
  • BA0022700X