Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

著者

• Glembocki, Orest J.
• Pollak, Fred H.
• Ponce, Fernando A.
• Optical Society of America
• Society of Photo-optical Instrumentation Engineers
• Metallurgical Society (U.S.)

書誌事項

Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 946）

The Society, c1988

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA10254803
• ISBN:
  • 0892529814
• LCCN: 88060787
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., U.S.A.
• ページ数/冊数: viii, 234 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Spectrum analysis -- Congresses
• 親書誌ID:
  • BA0022700X