Vacuum mechatronics
著者
書誌事項
Vacuum mechatronics
（The Artech House materials science library）
Artech House, c1990
大学図書館所蔵 全3件
注記
Includes bibliographical references and index
内容説明・目次
内容説明
A combination of original material and reprints, this text explains vacuum mechanism design, control, components and applications including automated systems and robotics.
目次
- Introduction to vacuum mechatronics
- vacuum environment and applications
- reprints.
「Nielsen BookData」 より