Vacuum mechatronics
Author(s)
Bibliographic Information
Vacuum mechatronics
（The Artech House materials science library）
Artech House, c1990
Available at 3 libraries
Note
Includes bibliographical references and index
Description and Table of Contents
Description
A combination of original material and reprints, this text explains vacuum mechanism design, control, components and applications including automated systems and robotics.
Table of Contents
- Introduction to vacuum mechatronics
- vacuum environment and applications
- reprints.
by "Nielsen BookData"