Vacuum mechatronics
著者
書誌事項
Vacuum mechatronics
(The Artech House materials science library)
Artech House, c1990
大学図書館所蔵 件 / 全3件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
Includes bibliographical references and index
内容説明・目次
内容説明
A combination of original material and reprints, this text explains vacuum mechanism design, control, components and applications including automated systems and robotics.
目次
- Introduction to vacuum mechatronics
- vacuum environment and applications
- reprints.
「Nielsen BookData」 より