Microchip fabrication : a practical guide to semiconductor processing
著者
書誌事項
Microchip fabrication : a practical guide to semiconductor processing
McGraw-Hill, 1990
2nd ed
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book provides a completed technician-level explanation of the major issues and processes in semiconductor fabrication for non-engineers working in fabrication support functions, such as operations, planning, quality control, and technical personnel. Readers will also find invaluable coverage of wafer test and evaluation, manufacturing technology, semiconductor devices and structures, integrated circuit types, and chip packaging. Entirely updated and expanded to reflect all recent developments, this book is based on a seminar attended by over 800 technicians and other personnel.
目次
- Introduction
- Semiconductor Materials & Process Chemicals
- Crystal Growth & Wafer Preparation
- Contamination Control
- Overview of Water Fabrication
- Process Fields
- Oxidation
- Photolithography
- Doping
- Chemical Vapour Deposition
- Metalization
- Wafer Test
- Manufacturing Technology
- Semiconductor Devices & Structures
- Integrated Circuit Types
- Chip Packaging.
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