IEEE/SEMI International Semiconductor Manufacturing Science Symposium : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA

Author(s)

• IEEE/SEMI International Semiconductor Manufacturing Science Symposium
• Semiconductor Equipment and Materials International

Bibliographic Information

IEEE/SEMI International Semiconductor Manufacturing Science Symposium : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA

Institute of Electrical and Electronics Engineers , Additional copies may be purchased from IEEE Service Center, c1989

Note

"Theme: 'Semiconductor manufacturing'"

Includes bibliographical references

"IEEE catalog number 89CH2699-7"--T.p. verso

• NCID: BA10870589
• LCCN: 88659341
• Country Code: us
• Title Language Code: eng
• Place of Publication: New York, NY, U.S.A.,Piscataway, NJ, USA
• Pages/Volumes: 136 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Electronic Industries -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses