IEEE/SEMI International Semiconductor Manufacturing Science Symposium : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA
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書誌事項
IEEE/SEMI International Semiconductor Manufacturing Science Symposium : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA
Institute of Electrical and Electronics Engineers , Additional copies may be purchased from IEEE Service Center, c1989
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注記
"Theme: 'Semiconductor manufacturing'"
Includes bibliographical references
"IEEE catalog number 89CH2699-7"--T.p. verso
