Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.
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Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.
(Materials Research Society conference proceedings)
Materials Research Society, c1990
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Includes bibliography and index