Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.

Author(s)

• Wong, S. Simon
• Furukawa, Seijiro
• Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications V
• Materials Research Society

Bibliographic Information

Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.

editors, S. Simon Wong, Seijiro Furukawa ; associate editors, Roc Blumenthal ... [et al.] ; sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and October 19-20, 1989, Tokyo, Japan, sponsored by the Japan Society of Applied Physics

（Materials Research Society conference proceedings）

Materials Research Society, c1990

Note

Includes bibliography and index

Details

• NCID: BA10979941
• ISBN:
  • 1558990682
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa
• Pages/Volumes: xvi, 427 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA07468230