Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

書誌事項

Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

editors, Theodore M. Besmann, Bernard M. Gallois

(Materials Research Society symposium proceedings, v. 168)

Materials Research Society, c1990

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Includes bibliographical references and indexes

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内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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