Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug 28-Sept 1, 1989

Author(s)

• Craievich, Aldo
• de Souza, G. Gerson Bezerra
• Baranauskas, Vitor
• Workshop on Microlithography : High Integration in Microelectronics

Bibliographic Information

Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug 28-Sept 1, 1989

editors, Aldo Craievich, G. Gerson Bezerra de Souza, Vitor Baranauskas

World Scientific, c1990

Note

At head cover title: First Workshop

Details

• NCID: BA11057841
• ISBN:
  • 9810201370
• Country Code: si
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Singapore
• Pages/Volumes: viii, 184 p.
• Size: 23 cm