Hazard assessment and control technology in semiconductor manufacturing

著者

• American Conference of Governmental Industrial Hygienists

書誌事項

Hazard assessment and control technology in semiconductor manufacturing

[sponsored by] American Conference of Governmental Industrial Hygienists

（Industrial hygiene science series）

Lewis Publishers, c1989

注記

Papers presented at a symposium sponsored by the American Conference of Governmental Industrial Hygienists and others and held in Cincinnati, Ohio, Oct. 20-22, 1987

Includes bibliographies and index

• NII書誌ID(NCID): BA11102618
• ISBN:
  • 0873711327
• LCCN: 88037742
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Chelsea, Mich.
• ページ数/冊数: vii, 322 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductor industry -- Safety measures -- Congresses
• 親書誌ID:
  • BA0766335X