Proceedings of the Symposium on Patterning Science and Technology

著者

• Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)
• Gleason, Robert
• Hefferon, George J.
• White, L. K.
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division
• Electrochemical Society. Luminescence and Display Materials Group

書誌事項

Proceedings of the Symposium on Patterning Science and Technology

edited by Robert Gleason, George J. Hefferon, L.K. White ; [sponsored by the] Dielectrics and Insulation and Electronics divisions and Luminescence and Display Materials Group

（Proceedings / [Electrochemical Society], v. 90-1）

Electrochemical Society, c1990

タイトル別名

Patterning science and technology

注記

Spine title: Patterning science and technology

"The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--P. iii

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA11132506
• LCCN: 90080468
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ (10 S. Main St., Pennington 08534-2896)
• ページ数/冊数: vii, 248 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/531
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Photoresists -- Congresses
  • LCSH : Masks (Electronics) -- Congresses
• 親書誌ID:
  • BA01323290