Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
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Bibliographic Information
Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 165）
Materials Research Society, c1990
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Includes bibliographical references and index
Description and Table of Contents
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
by "Nielsen BookData"
