{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BA11202838.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BA11202838#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BA11202838.json"},"dc:title":[{"@value":"Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A."}],"dc:creator":"editors, Avishay Katz, Shyam P. Murarka, Ami Appelbaum","dc:publisher":[{"@value":"Materials Research Society"}],"dcterms:extent":"xv, 633 p.","cinii:size":"24 cm","dc:language":"eng","dc:date":"1990","cinii:ncid":"BA11202838","cinii:ownerCount":"10","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA05347504#entity","@type":"foaf:Person","foaf:name":[{"@value":"Katz, Avishay"}]},{"@id":"https://ci.nii.ac.jp/author/DA03701420#entity","@type":"foaf:Person","foaf:name":[{"@value":"Murarka, S. P."}]},{"@id":"https://ci.nii.ac.jp/author/DA05347515#entity","@type":"foaf:Person","foaf:name":[{"@value":"Appelbaum, Ami"}]},{"@id":"https://ci.nii.ac.jp/author/DA05347548#entity","@type":"foaf:Person","foaf:name":[{"@value":"Symposium on Advanced Metallizations in Microelectronics"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA000106","@type":"foaf:Organization","foaf:name":"東京科学大学 大岡山図書館","rdfs:seeAlso":{"@id":"https://topics.libra.titech.ac.jp/recordID/catalog.bib/BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA002542","@type":"foaf:Organization","foaf:name":"名古屋工業大学 図書館","rdfs:seeAlso":{"@id":"https://opac.lib.nitech.ac.jp/opc/recordID/catalog.bib/BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA002702","@type":"foaf:Organization","foaf:name":"京都大学 工学部","rdfs:seeAlso":{"@id":"https://kuline.kulib.kyoto-u.ac.jp/opac/opac_openurl/?ncid=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA002870","@type":"foaf:Organization","foaf:name":"大阪大学 附属図書館 理工学図書館","rdfs:seeAlso":{"@id":"https://opac.library.osaka-u.ac.jp/opac/opac_openurl/?ncid=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA004876","@type":"foaf:Organization","foaf:name":"千葉工業大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac2.lib.chibatech.ac.jp/"}},{"@id":"https://ci.nii.ac.jp/library/FA006893","@type":"foaf:Organization","foaf:name":"湘南工科大学 附属図書館","rdfs:seeAlso":{"@id":"https://lib.shonan-it.ac.jp/CARIN/CARINOPACLINK.HTM?OAL=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA007739","@type":"foaf:Organization","foaf:name":"立命館大学 図書館","rdfs:seeAlso":{"@id":"http://runners.ritsumei.ac.jp/opac/opac_openurl/?ncid=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA016922","@type":"foaf:Organization","foaf:name":"高知工科大学 附属情報図書館","rdfs:seeAlso":{"@id":"https://www-opac.lib.kppuc.ac.jp/mylimedio/search/search.do?target=local&mode=comp&category-mgz=1&category-book=1&annex=all&ncid=BA11202838"}},{"@id":"https://ci.nii.ac.jp/library/FA020169","@type":"foaf:Organization","foaf:name":"北九州学術研究都市学術情報センター","rdfs:seeAlso":{"@id":"http://lib.hibikino.ne.jp/webopac/ufirdi.do?ufi_target=ctlsrh&listcnt=20&maxcnt=1000&ncid=BA11202838"}}],"bibo:lccn":["90042268"],"rdfs:seeAlso":[{"@id":"https://lccn.loc.gov/90042268"}],"prism:publicationDate":["c1990"],"cinii:note":["\"The Symposium on Advanced Metallizations in Microelectronics ... was held as Symposium B of the 1990 Spring Meeting of the Materials Research Society\"--Pref","Includes bibliographical references and index"],"dc:subject":["LCC:TK7874","DC20:621.381"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Microelectronics+--+Congresses","dc:title":"Microelectronics -- Congresses"},{"@id":"https://ci.nii.ac.jp/books/search?q=Metallizing+--+Congresses","dc:title":"Metallizing -- Congresses"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA00013775#entity","dc:title":"Materials Research Society symposium proceedings, v. 181","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:1558990704"}]}]}