Integrated micro-motion systems : micromachining, control, and applications : a collection of contributions based on lectures presented at the Third Toyota Conference, Aichi, Japan, 22-25 October 1989

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Integrated micro-motion systems : micromachining, control, and applications : a collection of contributions based on lectures presented at the Third Toyota Conference, Aichi, Japan, 22-25 October 1989

edited by Fumio Harashima

Elsevier , Distributors for the U.S. and Canada, Elsevier Science Pub. Co., c1990

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